Full-field deflectometry for detection of mid-spatial frequency errors of high-precision mirrors (Conference Presentation)

Philippe Antoine; Luc Boussemaere; Arno Bouwens; Vincent Moreau; Benoit Borguet; Ksenia Sharshavina

doi:10.1117/12.2536804

18 November 2019 Full-field deflectometry for detection of mid-spatial frequency errors of high-precision mirrors (Conference Presentation)

Philippe Antoine, Luc Boussemaere, Arno Bouwens, Vincent Moreau, Benoit Borguet, Ksenia Sharshavina

Author Affiliations +

Proceedings Volume 11175, Optifab 2019; 111751F (2019) https://doi.org/10.1117/12.2536804
Event: SPIE Optifab, 2019, Rochester, New York, United States

Abstract

Full-field deflectometry, which combines high-precision and robustness to external perturbations, is well adapted for the characterization of high-precision freeform mirrors. Instead of measuring the surface height map like interferometry does, the instrument will estimate the surface slopes in two perpendicular directions. The principle of the method is to measure the angular distribution by applying spatial filtering in the Fourier plane of the mirror under test. This method has been called phase-shifting Schlieren deflectometry Inspection of mirrors in terms of slopes instead surface height offers multiple advantages. In particular, deflectometry is well adapted for the detection of waviness, which is a mid-spatial frequency topography error. Waviness detection during the diamond turning process is critical since it is hard to remove afterwards by polishing. Keeping the mirror mounted in the lathe during the measurement of its shape will simplify the process since it will avoid misalignment when re-mounting the mirror in the lathe. The presentation will discuss the principles of phase-shifting Schlieren deflectometry, the performance specification based on the tolerance study of the four-mirror spectrometer, the design of the new instrument under development and finally preliminary measurements of freeform mirrors performed at AMOS with the mirror mounted in the lathe that demonstrate the capability of the instrument for the detection of mid-spatial frequency errors.

Conference Presentation

Citation Download Citation

Philippe Antoine, Luc Boussemaere, Arno Bouwens, Vincent Moreau, Benoit Borguet, and Ksenia Sharshavina "Full-field deflectometry for detection of mid-spatial frequency errors of high-precision mirrors (Conference Presentation)", Proc. SPIE 11175, Optifab 2019, 111751F (18 November 2019); https://doi.org/10.1117/12.2536804

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KEYWORDS

Mirrors

Deflectometry

Phase shifts

Diamond turning

Inspection

Interferometry

Polishing

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