An effective way to calibrate the external errors which are contributed in the interferometric test for spherical surfaces

Wei-Cheng Lin; Shenq-Tsong Chang; Hung-Pin Chen; Yu-Wei Lin; Hua-Lin Chen; Wei-Chun Chen; Cheng-Kuo Sung

doi:10.1117/12.2535902

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15 November 2019 An effective way to calibrate the external errors which are contributed in the interferometric test for spherical surfaces

Wei-Cheng Lin, Shenq-Tsong Chang, Hung-Pin Chen, Yu-Wei Lin, Hua-Lin Chen, Wei-Chun Chen, Cheng-Kuo Sung

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Proceedings Volume 11175, Optifab 2019; 1117520 (2019) https://doi.org/10.1117/12.2535902
Event: SPIE Optifab, 2019, Rochester, New York, United States

Abstract

Optical metrology is a critical and complicated technique for the fabrication of precision optics which surface figure is better than RMS 1/30λ. The intrinsic systematic error of the experimental setup including the alignment error of the metrology tool and manufacturing error of the reference optics shall be calibrated carefully. Nevertheless, the measured consequence also includes the surface deformation caused by mounting supporter and gravity effect, which may result in a misleading judgment for surface figure correction, especially for mid- to-large optics. Besides the systematic error of experimental setup and deformation by an external condition of the optics, the environmental condition such as temperature drift, air turbulence, and vibration also affect the measured result. This paper proposes a method which adopts the magnitude and phase of each non-rotationally symmetrical Zernike coefficients grabbed from the multiple measurements from rotating the optics to analyze the absolute low-spatial frequency figures.

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Wei-Cheng Lin, Shenq-Tsong Chang, Hung-Pin Chen, Yu-Wei Lin, Hua-Lin Chen, Wei-Chun Chen, and Cheng-Kuo Sung "An effective way to calibrate the external errors which are contributed in the interferometric test for spherical surfaces", Proc. SPIE 11175, Optifab 2019, 1117520 (15 November 2019); https://doi.org/10.1117/12.2535902

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