Paper
12 November 2019 Enhanced seismic sensing based on epoxy waveguide Bragg gratings
Steffen Hessler, Patrick Bott, Stefan Kefer, Maiko Girschikofsky, Bernhard Schmauß, Ralf Hellmann
Author Affiliations +
Abstract
We report on the fabrication process and the application potential of epoxy-based waveguide Bragg grating sensors on low-modulus polymer substrates for low-cost environmental seismic sensing purposes. EpoCore photoresist channel waveguides are fabricated on a highly flexible TPX polymethylpentene polyolefin substrate by means of standard i-line photolithography. Bragg gratings are permanently inscribed into the strip waveguides by KrF excimer laser irradiation using commercially available phase masks. From these raw sensor chips, a linear accelerometer sensitivity of 107 pm/g in a broadband detection range of at least 0.025 – 15 g could be observed. The enhanced seismic sensing capabilities of the Bragg grating sensor scheme are demonstrated by the use of a simple spring mass system.
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Steffen Hessler, Patrick Bott, Stefan Kefer, Maiko Girschikofsky, Bernhard Schmauß, and Ralf Hellmann "Enhanced seismic sensing based on epoxy waveguide Bragg gratings", Proc. SPIE 11197, SPIE Future Sensing Technologies, 111970Q (12 November 2019); https://doi.org/10.1117/12.2542646
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KEYWORDS
Sensors

Bragg gratings

Waveguides

Polymers

Epoxies

Seismic sensors

Polymeric sensors

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