Vertical directional coupler network using a-Si slope waveguides

V. Mittal; R. Petra; A. Tarazona; N. J. Dinsdale; A. Khokhar; M. Banakar; D. Thomson; O. L. Musken; G. T. Reed; H. M. H. Chong

doi:10.1117/12.2542213

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30 December 2019 Vertical directional coupler network using a-Si slope waveguides

V. Mittal, R. Petra, A. Tarazona, N. J. Dinsdale, A. Khokhar, M. Banakar, D. Thomson, O. L. Musken, G. T. Reed, H. M. H. Chong

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Proceedings Volume 11200, AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019; 112001W (2019) https://doi.org/10.1117/12.2542213
Event: ANZCOP, 2019, Melbourne, Australia

Abstract

A CMOS compatible three-dimensional (3D) integrated photonics circuit for multilayer silicon photonics is reported. Slopes with angles between 10o and 15° were created in the oxide layer using single step wet etching to connect the two Si waveguide layers. Amorphous Si (a-Si) deposited using hot wire chemical vapor deposition (HWCVD) at a temperature of 230°C was used to fabricate the device. Losses of 0.5 dB/slope were measured in the slope waveguides at 1310 nm wavelength. As a demonstration, we propose a 4x4 network switch using a-Si based vertical directional coupler.

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V. Mittal, R. Petra, A. Tarazona, N. J. Dinsdale, A. Khokhar, M. Banakar, D. Thomson, O. L. Musken, G. T. Reed, and H. M. H. Chong "Vertical directional coupler network using a-Si slope waveguides", Proc. SPIE 11200, AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019, 112001W (30 December 2019); https://doi.org/10.1117/12.2542213

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