Paper
30 December 2019 Nanostructured all-silicon photodetector pixels with tailored responsivity spectra
Jasper J. Cadusch, Jiajun Meng, Kenneth B. Crozier
Author Affiliations +
Abstract
We experimentally demonstrate nanostructured silicon photodetectors which consist of subwavelength arrays of verticallyoriented waveguides etched into a P-I-N photodiode. Our device combines both spectral-filtering and photocurrentgeneration in one all-Si structure. We show that absorption and responsivity spectra of these nanophotonic devices can be tuned by appropriate geometric design.
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Jasper J. Cadusch, Jiajun Meng, and Kenneth B. Crozier "Nanostructured all-silicon photodetector pixels with tailored responsivity spectra", Proc. SPIE 11200, AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019, 112003C (30 December 2019); https://doi.org/10.1117/12.2541213
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KEYWORDS
Photodetectors

Waveguides

Absorption

Silicon

Nanostructuring

Sensors

Nanophotonics

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