Partial coherence measurement for the illumination system in excimer laser lithography based on CCD image sensor

Pei Lu; Xiaoyong Liu; Qin Shi; Jianxin Shao; Yongcai Zhang; Zhenzhen Zheng

doi:10.1117/12.2547679

Translator Disclaimer

20 December 2019 Partial coherence measurement for the illumination system in excimer laser lithography based on CCD image sensor

Pei Lu, Xiaoyong Liu, Qin Shi, Jianxin Shao, Yongcai Zhang, Zhenzhen Zheng

Author Affiliations +

Proceedings Volume 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019); 112091V (2019) https://doi.org/10.1117/12.2547679
Event: Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 2019, Xi'an, China

Abstract

Partial coherence is one of the important parameters for evaluating the performance of lithographic tool. In this paper, we present a novel method of partial coherence measurement for the illumination system based on CCD image sensor. Partial coherence measurement can be performed by using a pinhole placed in the mask plane under different illumination system. We simulate the light source image of different illumination pupil distributions as well as the energy center by determining the gray value of spot. We show measurement values and measurement errors of partial coherence for illumination system. The statistics of the measurement results and the sensitivity analysis of the system indicate that measurement values and measurement errors of partial coherence satisfy the measurement requirement from our method in the wafer plane.

Citation Download Citation

Pei Lu, Xiaoyong Liu, Qin Shi, Jianxin Shao, Yongcai Zhang, and Zhenzhen Zheng "Partial coherence measurement for the illumination system in excimer laser lithography based on CCD image sensor", Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112091V (20 December 2019); https://doi.org/10.1117/12.2547679

ACCESS THE FULL ARTICLE