Small Particles And Thin Film TEM Observation On Silicon Substrate

Yves Lepetre

doi:10.1117/12.961369

8 January 1990 Small Particles And Thin Film TEM Observation On Silicon Substrate

Yves Lepetre

Proceedings Volume 1125, Thin Films in Optics; (1990) https://doi.org/10.1117/12.961369
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

We applied our microcleavage technique to observe various thin films deposited on silicon substrate by evaporation and sputtering. To be observed by TEM, small particles are usually deposited on thin films such as amorphous carbon films. We present the unique possibilities of our technique to observe them when a thick brittle substrate is used. As we already did it in multilayer characterization, the substrate is used as an in-situ scale.

Citation Download Citation

Yves Lepetre "Small Particles And Thin Film TEM Observation On Silicon Substrate", Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); https://doi.org/10.1117/12.961369

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