Laser processing of titanium: oxide formation for electronic applications

Kristin M. Charipar; Heungsoo Kim; Christopher Musi; Raymond C. Y. Auyeung; Alberto Piqué; Nicholas A. Charipar

doi:10.1117/12.2546952

2 March 2020 Laser processing of titanium: oxide formation for electronic applications

Kristin M. Charipar, Heungsoo Kim, Christopher Musi, Raymond C. Y. Auyeung, Alberto Piqué, Nicholas A. Charipar

Proceedings Volume 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV; 112670H (2020) https://doi.org/10.1117/12.2546952
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

The formation of laser-induced oxide layers on titanium surfaces has been widely investigated for coloring and marking applications. Complex titanium-based oxides exhibiting multiple phases can be achieved through laser patterning. Laser processing offers several advantages in that discrete areas can be modified leading to patterns with differing optical and electronic properties. To date, most research has focused on the formation and thickness control of TiO₂, a wide bandgap semiconductor (~ 3.2 eV), as a means to control coloration. However, for many applications, including photodetectors and photocatalysts, a semiconductor oxide with a narrow bandgap (< 1 eV) is preferred to allow for strong absorption into the mid-IR. Other oxides and sub-oxides such as Ti₂O₃ have been identified as a byproduct of laser surface processing. In addition to its narrow bandgap, bulk Ti₂O₃ offers the unique property of having a semiconductor-metal transition at around 150 – 200°C where resistivity switches over an order of magnitude. Because of these properties, we investigate the optimization of laser processing conditions using picosecond and femtosecond laser irradiation to form Ti₂O₃. The effect of laser fluence, scan speed, pulse frequency, and sample chamber pressure will be discussed. Additionally, Ti₂O₃ thin films were grown via pulsed laser deposition to study structural phase purity, where the effect of growth temperature on optical and electrical properties is explored.

Citation Download Citation

Kristin M. Charipar, Heungsoo Kim, Christopher Musi, Raymond C. Y. Auyeung, Alberto Piqué, and Nicholas A. Charipar "Laser processing of titanium: oxide formation for electronic applications", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 112670H (2 March 2020); https://doi.org/10.1117/12.2546952

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KEYWORDS

Titanium

Laser processing

Oxides

Thin films

Raman spectroscopy

Femtosecond phenomena

Picosecond phenomena

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