Transparent conductive oxides for integrated photonics and silicon photonics (Conference Presentation)

Alan X. Wang

doi:10.1117/12.2549396

10 March 2020 Transparent conductive oxides for integrated photonics and silicon photonics (Conference Presentation)

Alan X. Wang

Proceedings Volume 11281, Oxide-based Materials and Devices XI; 1128117 (2020) https://doi.org/10.1117/12.2549396
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Transparent conductive oxides (TCOs) have attracted significant research interests for integrated photonics and silicon photonics due to their dramatic change of optical permittivity, which can be dynamically controlled by the gate voltage. In addition, TCO materials can be easily integrated with silicon photonic devices by sputtering and regular lithography process, which demonstrates great potentials for large-scale integration. We report our recent research progress of hybrid silicon-TCO photonic devices using TCO gate/high-K insulator (HfO2)/Si waveguides, which achieves both outstanding energy efficiency and high modulation bandwidth. The strategy for future on-chip optical interconnect systems will also be discussed in this presentation.

Conference Presentation

Citation Download Citation

Alan X. Wang "Transparent conductive oxides for integrated photonics and silicon photonics (Conference Presentation)", Proc. SPIE 11281, Oxide-based Materials and Devices XI, 1128117 (10 March 2020); https://doi.org/10.1117/12.2549396

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