CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications

Rainer Hainberger; Paul Muellner; Moritz Eggeling; Alejandro Maese-Novo; Stefan Nevlacsil; Jörg Schotter; Florian Vogelbacher; Jochen Kraft; Martin Sagmeister; Xue Zhou; Jinhua Huang; Mingzhu Li; Ke-Jian Jiang; Yanlin Song; Dana Seyringer; Elisabet Rank; Wolfgang Drexler

doi:10.1117/12.2543585

25 February 2020 CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications

Rainer Hainberger, Paul Muellner, Moritz Eggeling, Alejandro Maese-Novo, Stefan Nevlacsil, Jörg Schotter, Florian Vogelbacher, Jochen Kraft, Martin Sagmeister, Xue Zhou, Jinhua Huang, Mingzhu Li, Ke-Jian Jiang, Yanlin Song, Dana Seyringer, Elisabet Rank, Wolfgang Drexler

Author Affiliations +

Proceedings Volume 11283, Integrated Optics: Devices, Materials, and Technologies XXIV; 112830P (2020) https://doi.org/10.1117/12.2543585
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

In this paper, we report our recent advances in the development of CMOS compatible PECVD silicon nitride waveguide based photonic key building blocks for optical coherence tomography (OCT) in the 850 nm wavelength region and for biosensing applications in the visible domain around 650 nm wavelength. We discuss the design and experimental verification of compact low-loss waveguide bends, broadband couplers with varying power splitting ratios required for PIC based OCT systems, arrayed waveguide gratings for spectral domain OCT, and a monolithically integrated optically pumped organic solid-state laser for low-cost biosensing applications.

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Rainer Hainberger, Paul Muellner, Moritz Eggeling, Alejandro Maese-Novo, Stefan Nevlacsil, Jörg Schotter, Florian Vogelbacher, Jochen Kraft, Martin Sagmeister, Xue Zhou, Jinhua Huang, Mingzhu Li, Ke-Jian Jiang, Yanlin Song, Dana Seyringer, Elisabet Rank, and Wolfgang Drexler "CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications", Proc. SPIE 11283, Integrated Optics: Devices, Materials, and Technologies XXIV, 112830P (25 February 2020); https://doi.org/10.1117/12.2543585

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