Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit (Conference Presentation)

Giuseppe Antonacci; Jeroen Goyvaerts; Haolan Zhao; Bettina Baumgartner; Bernhard Lendl; Roel Baets

doi:10.1117/12.2557047

9 March 2020 Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit (Conference Presentation)

Giuseppe Antonacci, Jeroen Goyvaerts, Haolan Zhao, Bettina Baumgartner, Bernhard Lendl, Roel Baets

Author Affiliations +

Proceedings Volume 11285, Silicon Photonics XV; 112851E (2020) https://doi.org/10.1117/12.2557047
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

We demonstrate a compact on-chip gas sensor based on a SiN photonic integrated circuit providing an estimated detection limit of 0.1ppm for a variety of gas vapors, including IPA, ethanol and acetone. The sensor consists of an integrated Mach-Zehnder interferometer having one arm coated with an absorptive mesoporous layer to enhance the interaction of the gas vapors with the waveguide evanescent field. Gas detection is accomplished by monitoring the spectral shift of the output signal induced by a change in the effective refractive index of the coated waveguide. Results pave the way to novel integrated solutions for environmental safety monitoring.

Conference Presentation

Citation Download Citation

Giuseppe Antonacci, Jeroen Goyvaerts, Haolan Zhao, Bettina Baumgartner, Bernhard Lendl, and Roel Baets "Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit (Conference Presentation)", Proc. SPIE 11285, Silicon Photonics XV, 112851E (9 March 2020); https://doi.org/10.1117/12.2557047

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KEYWORDS

Gas sensors

Environmental sensing

Mach-Zehnder interferometers

Refractive index

Silicon

Waveguides

Optical sensing

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