Monolithic integration of quantum cascade laser, quantum cascade detector, and passive components for absorption sensing at [lambda] = 4.6 μm

Jason Midkiff; Kyoung Min Yoo; Hamed Dalir; Ray T. Chen

doi:10.1117/12.2546327

2 March 2020 Monolithic integration of quantum cascade laser, quantum cascade detector, and passive components for absorption sensing at λ = 4.6 μm

Jason Midkiff, Kyoung Min Yoo, Hamed Dalir, Ray T. Chen

Author Affiliations +

Proceedings Volume 11288, Quantum Sensing and Nano Electronics and Photonics XVII; 112882F (2020) https://doi.org/10.1117/12.2546327
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

With the mid-infrared spectral region (3 to 20 µm) home to the fundamental absorption peaks of most molecules, the region has come to be known as the “molecular-fingerprint” region and various technologies have evolved to perform the detection and quantification task. Popular technologies include cavity ring-down spectroscopy, tunable diode laser absorption spectroscopy and Fourier transform infrared spectroscopy; and parts-per-billion sensitivity is commonly achieved. But the size, weight and sensitive optics of these technologies tends to limit their use to the laboratory. Field applications, particularly airborne and handheld ones, demand compact on-chip technologies. Now, with the ability of quantum cascade lasers (QCLs) to provide narrow-band tunable room-temperature emission across the majority of the mid-infrared region, the move to on-chip technologies is enabled. In this work we seek to demonstrate the monolithic integration of QCL, quantum cascade detector (QCD) and passive components for an on-chip gas sensor around λ = 4.6 μm (an absorption peak of carbon monoxide). Since most efficient QCLs have been demonstrated in InP-based material, we use a lattice-matched InGaAs/InP platform to avoid the low-yield lossy costs of bonding, and work with a single-growth epitaxial structure. Light is coupled from the QCL active region downward to the passive InGaAs waveguide structure by a coupling taper; interaction with the analyte occurs on or near the passive structure and is subsequently passed to the QCD. Variations in design are investigated to compare sensitivity.

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Jason Midkiff, Kyoung Min Yoo, Hamed Dalir, and Ray T. Chen "Monolithic integration of quantum cascade laser, quantum cascade detector, and passive components for absorption sensing at λ = 4.6 μm", Proc. SPIE 11288, Quantum Sensing and Nano Electronics and Photonics XVII, 112882F (2 March 2020); https://doi.org/10.1117/12.2546327

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KEYWORDS

Quantum cascade lasers

Sensors

Waveguides

Absorption

Etching

Dry etching

Optical lithography

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