Space-variant quarter- and half-wave plates fabricated by combining 3D laser direct writing and electroplating

Stefan Belle; Stefan F. Helfert; Ralf Hellmann; Jürgen Jahns

doi:10.1117/12.2543560

28 February 2020 Space-variant quarter- and half-wave plates fabricated by combining 3D laser direct writing and electroplating

Stefan Belle, Stefan F. Helfert, Ralf Hellmann, Jürgen Jahns

Author Affiliations +

Proceedings Volume 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII; 1129212 (2020) https://doi.org/10.1117/12.2543560
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

In this contribution, we present the fabrication of space-variant quarter- and half-wave plates, by combining 3D laser direct writing with electroplating. A negative of the space-variant wave plates was fabricated with 3D laser direct writing in a positive tone photoresist. With an electrochemical deposition process the negative structure of the wave plates was filled with gold. This process allows fabrication of a non-quadratic air filled cross-section surrounded by a metallic cladding, a so-called hollow waveguide array. The wave plates consists of about 1000 x 1500 hollow waveguides each with sub-wavelength dimensions for an operating wavelength of 1550 nm.

Citation Download Citation

Stefan Belle, Stefan F. Helfert, Ralf Hellmann, and Jürgen Jahns "Space-variant quarter- and half-wave plates fabricated by combining 3D laser direct writing and electroplating", Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129212 (28 February 2020); https://doi.org/10.1117/12.2543560

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