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Design framework for high-speed 3D scanning tools and development of an axial focusing micromirror-based array
A triple-wafer-bonded AlScN driven quasi-static MEMS mirror with high linearity and large tilt angles
Wide and fast mode-hop free MEMS tunable ECDL concept and realization in the NIR and MIR spectral regime
Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation
Engineering the glass waveguide surface for uniform light refraction inside an optofluidic photoreactor (Conference Presentation)
Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation
Modeling and characterization of the reflectance of vertical metal-coated micromirrors in deeply-etched optical benches