Translator Disclaimer
Paper
28 February 2020 Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR
Author Affiliations +
Proceedings Volume 11293, MOEMS and Miniaturized Systems XIX; 1129309 (2020) https://doi.org/10.1117/12.2546035
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
Presented here is the world’s first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fabian Schwarz, Frank Senger, Jörg Albers, Pauline Malaurie, Christian Janicke, Leon Pohl, Felix Heinrich, Dirk Kaden, Hans-Joachim Quenzer, Fabian Lofink, Andreas Bahr, Thomas von Wantoch, and Ulrich Hofmann "Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 1129309 (28 February 2020); https://doi.org/10.1117/12.2546035
PROCEEDINGS
17 PAGES


SHARE
Advertisement
Advertisement
Back to Top