Molybdenum silicide in infrared emitting devices

Julia Baldauf; Rüdiger Schmidt-Grund; Manfred Reiche; Thomas Ortlepp

doi:10.1117/12.2556681

28 February 2020 Molybdenum silicide in infrared emitting devices

Julia Baldauf, Rüdiger Schmidt-Grund, Manfred Reiche, Thomas Ortlepp

Proceedings Volume 11293, MOEMS and Miniaturized Systems XIX; 112930Y (2020) https://doi.org/10.1117/12.2556681
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

We present and discuss the infrared properties of molybdenum silicide thin films, molybdenum silicide photonic crystals and the electromigration of molybdenum silicide. Magnetronsputtered and annealed molybdenum silicide layers were investigated via infrared spectral ellipsometry. Simulations of optical properties of molybdenum silicide photonic crystals [metal-insulator-metal structures] show that properties influenced by the size of the structures differ to those of widely used photonic crystals made of Ag. The infrared absorption of MIM-structures comprising of a solid molybdenum silicide layer and one molybdenum silicide layer in form of disks were simulated for different disk diameters and layer thicknesses. A first maximum of absorption (at about 2740 nm) is almost independent of the diameter of the molybdenum silicide disk. A second maximum of absorption (7120 nm -7750 nm) shows an increase of its resonance wavelength with increasing disk diameter. A third maximum of absorption (at about 11000nm) instead shows a respective decrease. In the simulations the thicknesses of the metal layers and the dielectric layer were varied. Changes in the thickness of the dielectric layer caused greater changes in the absorption spectra than changes in the thicknesses of the metal layers. For the application in thermal emitters, the knowledge of electromigration properties of molybdenum silicide layers is crucial. Investigations via accelerated tests with different acceleration factors are demonstrated for test structures. We investigated structures based on molybdenum silicide and for comparison with a well known system analogous structures made of aluminum. We find that molybdenum silicide shows considerably lower electromigration than aluminium.

Citation Download Citation

Julia Baldauf, Rüdiger Schmidt-Grund, Manfred Reiche, and Thomas Ortlepp "Molybdenum silicide in infrared emitting devices", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 112930Y (28 February 2020); https://doi.org/10.1117/12.2556681

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