Innovations with a massively paralleled, microelectromechanical systems (MEMS) toward piston-mode-based phase light modulator (PLM)

Patrick I. Oden; Terry A. Bartlett; William C. McDonald; James C. Baker; James N. Hall

doi:10.1117/12.2550582

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28 February 2020 Innovations with a massively paralleled, microelectromechanical systems (MEMS) toward piston-mode-based phase light modulator (PLM)

Patrick I. Oden, Terry A. Bartlett, William C. McDonald, James C. Baker, James N. Hall

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Proceedings Volume 11294, Emerging Digital Micromirror Device Based Systems and Applications XII; 112940G (2020) https://doi.org/10.1117/12.2550582
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Piston‐mode Fourier based optical imaging created using an adaptation of the base DLP® Products torsional, spatial light modulator technology is presented. Technology, advancements and performance metrics such as, actuation speed, efficiency, and pixel coupling are shown for this 10.8 μm pitched pixel array. Device potential includes upwards of 5.7kframes/sec actuation.

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Patrick I. Oden, Terry A. Bartlett, William C. McDonald, James C. Baker, and James N. Hall "Innovations with a massively paralleled, microelectromechanical systems (MEMS) toward piston-mode-based phase light modulator (PLM)", Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 112940G (28 February 2020); https://doi.org/10.1117/12.2550582

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