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28 February 2020 Innovations with a massively paralleled, microelectromechanical systems (MEMS) toward piston-mode-based phase light modulator (PLM)
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Abstract
Piston‐mode Fourier based optical imaging created using an adaptation of the base DLP® Products torsional, spatial light modulator technology is presented. Technology, advancements and performance metrics such as, actuation speed, efficiency, and pixel coupling are shown for this 10.8 μm pitched pixel array. Device potential includes upwards of 5.7kframes/sec actuation.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrick I. Oden, Terry A. Bartlett, William C. McDonald, James C. Baker, and James N. Hall "Innovations with a massively paralleled, microelectromechanical systems (MEMS) toward piston-mode-based phase light modulator (PLM)", Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 112940G (28 February 2020); https://doi.org/10.1117/12.2550582
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