Paper
11 December 2019 Investigation of laser ablation destruction of polymer materials
Author Affiliations +
Proceedings Volume 11322, XIV International Conference on Pulsed Lasers and Laser Applications; 1132221 (2019) https://doi.org/10.1117/12.2555980
Event: XIV International Conference on Pulsed Lasers and Laser Applications (AMPL-2019), 2019, Tomsk, Russian Federation
Abstract
Pulsed laser ablation is at the basis of the processes of laser processing of materials and is used in high-tech production. A feature of laser ablation is the probabilistic nature of ablation destruction processes, which is due to the random spatial distribution of absorbing defects and their characteristics. This results in different laser breakdown threshold values, probabilistic development of laser plasma formation, and a strong relationship between the destruction threshold and the size of the laser radiation interaction region (dimensional effect). The authors carried out studies of laser ablation destruction of polymer materials. The samples were hafnium dioxide films on the silicon surface. The test materials were exposed to a pulse radiation Nd3+:YAG laser to measure the threshold energy density of the laser ablation and to relate the obtained values to the known properties of the nanocomposites.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
O. V. Mkrtychev, V. G. Shemanin, and Yu. V. Shevtsov "Investigation of laser ablation destruction of polymer materials", Proc. SPIE 11322, XIV International Conference on Pulsed Lasers and Laser Applications, 1132221 (11 December 2019); https://doi.org/10.1117/12.2555980
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KEYWORDS
Laser ablation

Polymers

Laser damage threshold

Laser processing

Hafnium

Silicon

Silicon films

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