Illumination control in lensless imaging for EUV mask inspection and review

Iacopo Mochi; Hyun-Su Kim; Uldis Locans; Atoosa Dejkameh; Ricarda Nebling; Dimitrios Kazazis; Yasin Ekinici

doi:10.1117/12.2552014

23 March 2020 Illumination control in lensless imaging for EUV mask inspection and review

Iacopo Mochi, Hyun-Su Kim, Uldis Locans, Atoosa Dejkameh, Ricarda Nebling, Dimitrios Kazazis, Yasin Ekinici

Proceedings Volume 11323, Extreme Ultraviolet (EUV) Lithography XI; 113231I (2020) https://doi.org/10.1117/12.2552014
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

Coherence control and flexible pupil fill play a key role in the imaging of EUV reticles. This is also true for lensless metrology applications based on coherent diffraction imaging. We describe the concept and the key components of a Fourier synthesis illuminator designed to provide the RESCAN microscope with flexible illumination capabilities and to improve its resolution limit. In particular, we discuss the characteristics of the three mirrors of the new illuminator and the requirements for their multilayer coating.

Conference Presentation

Citation Download Citation

Iacopo Mochi, Hyun-Su Kim, Uldis Locans, Atoosa Dejkameh, Ricarda Nebling, Dimitrios Kazazis, and Yasin Ekinici "Illumination control in lensless imaging for EUV mask inspection and review", Proc. SPIE 11323, Extreme Ultraviolet (EUV) Lithography XI, 113231I (23 March 2020); https://doi.org/10.1117/12.2552014

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