Development of ion exchange purification for advanced materials contain siloxane polymer

Takumi Oya; Suguru Sassa

doi:10.1117/12.2553654

23 March 2020 Development of ion exchange purification for advanced materials contain siloxane polymer

Takumi Oya, Suguru Sassa

Proceedings Volume 11326, Advances in Patterning Materials and Processes XXXVII; 113261R (2020) https://doi.org/10.1117/12.2553654
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

The purification method to produce highly pure products containing siloxane polymer was developed. Siloxane polymer can be difficult to be purified without changing its property because of its high reactivity. Of various methods, ion exchange is well known as a useful method for a purification. However, resins with cation or anion exchange groups used in the purification process can promote hydrolysis and dehydration condensation reaction of siloxane polymer. That is why the method had not been used for the purification of siloxane polymer. In this study, conditions of the ion exchange method were reviewed. As a result, it was found that using strongly acidic cation exchange resins with gel structure is a proper condition. And also simulation models of the polymerization of siloxane polymer and the ion exchange reaction were applied to the purification process. By using these simulations, process parameters of the purification such as process time for ion exchange can be optimized.

Citation Download Citation

Takumi Oya and Suguru Sassa "Development of ion exchange purification for advanced materials contain siloxane polymer", Proc. SPIE 11326, Advances in Patterning Materials and Processes XXXVII, 113261R (23 March 2020); https://doi.org/10.1117/12.2553654

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