Challenges in the patterning of RRAM devices for analog computing applications (Conference Presentation)

Iqbal Saraf; Shyam Sridhar; Christopher Catano; Sergey Voronin; Dexin Kong; Soon-Cheon Seo; Youngseok Kim; Takashi Ando; Nicole Saulnier; Vijay Narayanan

doi:10.1117/12.2552035

24 March 2020 Challenges in the patterning of RRAM devices for analog computing applications (Conference Presentation)

Iqbal Saraf, Shyam Sridhar, Christopher Catano, Sergey Voronin, Dexin Kong, Soon-Cheon Seo, Youngseok Kim, Takashi Ando, Nicole Saulnier, Vijay Narayanan

Author Affiliations +

Proceedings Volume 11329, Advanced Etch Technology for Nanopatterning IX; 113290N (2020) https://doi.org/10.1117/12.2552035
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

Emerging memory technologies such as Resistive Memory (RRAM) have gained a lot of attention to meet the requirements of a potential analog computing element, due to its non-volatile characteristics, scalability and energy efficiency. An RRAM device typically consists of a resistive switching layer (e.g. HfO2) sandwiched between two metal electrodes. Since oxygen vacancies are critical to the functioning of the device, it is desirable to achieve residue free etching using oxygen-less plasmas, and preferably minimize exposure to ambient environment. In this work, we discuss the RRAM patterning challenges and their impact on the device characteristics including the switching/forming voltage.

Conference Presentation

Citation Download Citation

Iqbal Saraf, Shyam Sridhar, Christopher Catano, Sergey Voronin, Dexin Kong, Soon-Cheon Seo, Youngseok Kim, Takashi Ando, Nicole Saulnier, and Vijay Narayanan "Challenges in the patterning of RRAM devices for analog computing applications (Conference Presentation)", Proc. SPIE 11329, Advanced Etch Technology for Nanopatterning IX, 113290N (24 March 2020); https://doi.org/10.1117/12.2552035

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available