A high-precision 6D sensor based on optoelectronic measurement

Ziyue Zhao

doi:10.1117/12.2543351

18 December 2019 A high-precision 6D sensor based on optoelectronic measurement

Ziyue Zhao

Proceedings Volume 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications; 113340O (2019) https://doi.org/10.1117/12.2543351
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

In order to solve the low precision and poor universality of the existing 6D sensors, a novel sensor is designed based on optical measurement. After the precision influence factor is analyzed, the numbers, layout and material of the target points on 6D sensor are especially considered. And then the structure of six points in the space by using infrared laser is designed. The double theodolites measurement network is used to calibrate the structure parameters of the sensor in order to improve precision. After the mathematic principle is given, both calculation methods for optimization based on Levenberg-Marquardt and the produce of the initial value based on lagrangian multiplier are stated. The experimental data show that the root-mean-square errors of three rotation angles are 0.017°，0.013°and 0.017°. The root-mean-square errors of three translation parameters are 0.077mm，0.095mm，0.079mm. The precision can meet the requirements and the 6D sensor can be successfully used in the manufacturing industry.

Citation Download Citation

Ziyue Zhao "A high-precision 6D sensor based on optoelectronic measurement", Proc. SPIE 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications, 113340O (18 December 2019); https://doi.org/10.1117/12.2543351

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