Processing Of Diffraction Patterns Scanned With A Photodiode Array Influence Of The Optical Transfer Function Of Diodes On Linewidth Measurements

C. Ozkul; A. Leduc; D. Allano; M. Abdelghani-Idrissi

doi:10.1117/12.961655

11 October 1989 Processing Of Diffraction Patterns Scanned With A Photodiode Array Influence Of The Optical Transfer Function Of Diodes On Linewidth Measurements

C. Ozkul, A. Leduc, D. Allano, M. Abdelghani-Idrissi

Author Affiliations +

Proceedings Volume 1135, Image Processing III; (1989) https://doi.org/10.1117/12.961655
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Far-field diffraction patterns of a glass cylinder are spatially sampled with a photodiode array. Three photometric signal processing methods are discussed. The first one is based on the analysis of fringes in the central lobe. It can be used for diameter monitoring, but not for a wide range of diameter measurements. The second method consists of best fitting between the theoretical model of the irradiance distribution in the central fringe and the corresponding experimental data. The accuracy of this method (± 1μm, in the range 10-50μm) is improved by introducing the OTF of the photosensitive area in the calculation. The third method uses a reliable estimation of the intensity at the center and the half-width of the central fringe in order to resolve the inverse problem by Newton's method. This method can be used for real-time measurements but must be improved by statistical approaches.

Citation Download Citation

C. Ozkul, A. Leduc, D. Allano, and M. Abdelghani-Idrissi "Processing Of Diffraction Patterns Scanned With A Photodiode Array Influence Of The Optical Transfer Function Of Diodes On Linewidth Measurements", Proc. SPIE 1135, Image Processing III, (11 October 1989); https://doi.org/10.1117/12.961655

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