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1 April 2020 Enhanced resolution MEMS spectrometer based on FTIR technique combined with reflection-type etalon
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In this work we present a scheme to enhance the spectral resolution of the MEMS FTIR spectrometer by cascading it with a reflection-type Fabry-Perot (FP) cavity. In this scheme, we use the different FP longitudinal modes in the reflection response within the FTIR spectrometer range simultaneously to scan the entire spectrum of the measured material, while at the same time the FTIR discriminates between the contributions of those different modes. This discrimination can only be made successfully given that the resolution of the FTIR engine is smaller than the free spectral range (FSR) of the reflection FP. A DSP algorithm is developed to decode the correct spectrum of the measured material using the presented spectrometer. The suggested architecture is implemented experimentally using a reflection FP cavity, consisting of a micromirror and a Bragg coated multimode optical fiber, with a scanning MEMS Michelson interferometer having a resolution of 16 nm at 1550 nm. A 50/50 optical splitter is used to cascade the reflection FP cavity and the MEMS Michelson interferometer. The system was used to resolve two laser lines at 1548 nm and 1554 nm achieving a resolution of 6 nm at 1550 nm leading to about 2.6 times enhancement in spectral resolution. The system was also used to measure the absorption lines of a references material in the wavelength range of 1450 nm to 1750 nm. The result was compared to the measurement of a bench top spectrometer with a good agreement.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Amir K. Shaheen, Yasser M. Sabry, and Diaa Khalil "Enhanced resolution MEMS spectrometer based on FTIR technique combined with reflection-type etalon", Proc. SPIE 11354, Optical Sensing and Detection VI, 113542A (1 April 2020);

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