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1 April 2020 Silicon based integrated hollow waveguide for gas sensing applications
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Abstract
Gas sensors are crucial instruments for different industries and air quality monitoring. Micro-electro-mechanical system MEMS technology was proved as a solution for reducing the cost and size of spectrometers. Building gas cells with same technology enables the whole integration of the whole sensor. We present an HWG, as an example for integarted gas cell, which is fabricated on the silicon wafer using the MEMS technology. The HWG length is 2 cm long. The insertion loss of the HWG was measured. Carbon dioxide from exhaling and butane were measured using the HWG in conjunction with the MEMS based spectrometer. This proves the applicability of such HWG for portable gas sensors.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alaa Fathy, Yasser M. Sabry, Frederic Marty, Diaa Khalil, and Tarik Bourouina "Silicon based integrated hollow waveguide for gas sensing applications", Proc. SPIE 11355, Micro-Structured and Specialty Optical Fibres VI, 113550T (1 April 2020); https://doi.org/10.1117/12.2554947
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