Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform

S. Monfray; S. Cremer; N. Vulliet; E. Dubois; F. Domengie; S. Jan; F. Baille; F. Boeuf

doi:10.1117/12.2554725

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2 April 2020 Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform

S. Monfray, S. Cremer, N. Vulliet, E. Dubois, F. Domengie , S. Jan, F. Baille, F. Boeuf

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Proceedings Volume 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications; 1136403 (2020) https://doi.org/10.1117/12.2554725
Event: SPIE Photonics Europe, 2020, Online Only

Abstract

This paper highlights the optimization of Deep Rib High Speed Phase Modulators for 400G applications thanks to the optimal choice of structure and implants through a Design Of Experiment analysis, including the proposal of a new Deep Rib HSPM with Z-implants. Results show 1,6dB gain in OMA (Optical Modulation of Amplitude) at the same cutoff frequency (fc=[2Pi*RC]^-1) compared to the previous generation [1] with optimized vertical implants, and up to 2,15dB gain vs [1] with the new Z-implant Deep Rib device.

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S. Monfray, S. Cremer, N. Vulliet, E. Dubois, F. Domengie , S. Jan, F. Baille, and F. Boeuf "Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform", Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 1136403 (2 April 2020); https://doi.org/10.1117/12.2554725

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