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2 April 2020 Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform
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Abstract
This paper highlights the optimization of Deep Rib High Speed Phase Modulators for 400G applications thanks to the optimal choice of structure and implants through a Design Of Experiment analysis, including the proposal of a new Deep Rib HSPM with Z-implants. Results show 1,6dB gain in OMA (Optical Modulation of Amplitude) at the same cutoff frequency (fc=[2Pi*RC]-1) compared to the previous generation [1] with optimized vertical implants, and up to 2,15dB gain vs [1] with the new Z-implant Deep Rib device.
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© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Monfray, S. Cremer, N. Vulliet, E. Dubois, F. Domengie , S. Jan, F. Baille, and F. Boeuf "Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform", Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 1136403 (2 April 2020); https://doi.org/10.1117/12.2554725
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