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14 May 2020 PIX4life’s silicon nitride integrated photonics platforms: present status and future outlook
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Abstract
Four years ago, the EU project PIX4life set out to mature an open access pilot line for silicon nitride integrated photonics, focused on life science applications. The synergies of industrial and academic project partners enabled the creation and validation of a unique pilot line using carefully selected demonstrator projects. Simultaneously, the software infrastructure (process design kits, design tools and building blocks) needed to enable early access of the pilot line through multi-project wafer (MPW) fabrication runs was created. After ten MPW fabrication runs in last three years at two foundries, and successful realization of dozens of designs from the project partners and the external customers, the pilot line is fully operational and ready for open access. In this presentation, we intend to share the experiences we have gained in setting up the pilot line, and to discuss the opportunities and challenges we can expect in future.
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© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Adil Masood, Douwe Geuzebroek, Pieter Dumon, Marcel van der Vliet, Iñigo Artundo, Romano Hoofman, and Hilde Jans "PIX4life’s silicon nitride integrated photonics platforms: present status and future outlook", Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 113640P (14 May 2020); https://doi.org/10.1117/12.2559868
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