Metal-insulator transition (MIT) actuators for microswitching applications

Protap Mahanta; Mohiuddin Munna; Ronald A. Coutu Jr.

doi:10.1117/12.2534711

6 December 2019 Metal-insulator transition (MIT) actuators for microswitching applications

Protap Mahanta, Mohiuddin Munna, Ronald A. Coutu Jr.

Proceedings Volume 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019; 1137108 (2019) https://doi.org/10.1117/12.2534711
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2019, Reykjavik, Iceland

Abstract

Transitional metal oxides have generated considerable interest in electronics and other engineering applications over the last few decades. These materials show several orders of magnitude metal-insulator transition (MIT) when triggered by an external stimuli. In this paper, an MIT (Vanadium Dioxide (VO₂)) -based bimorph cantilever shows promising performance due to its large volumetric work density, ultrafast response, and reliability. This this work, we propose and simulate a cantilever actuated via VO₂ for a micro-contact switch. Our results show VO₂ based actuators show promising performance in terms of deflection, resonance frequency, and lifetime.

Citation Download Citation

Protap Mahanta, Mohiuddin Munna, and Ronald A. Coutu Jr. "Metal-insulator transition (MIT) actuators for microswitching applications", Proc. SPIE 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019, 1137108 (6 December 2019); https://doi.org/10.1117/12.2534711

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KEYWORDS

Actuators

Resistance

Transition metals

Gold

Switches

Microelectromechanical systems

Electron transport

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