Scanning Tunneling Optical Microscopy (STOM) Using A Stylus Sensor Application To Topography Analysis Of Guiding Surfaces

Khaled Sarayeddine; Daniel Courjon; Michel Spajer

doi:10.1117/12.961775

28 September 1989 Scanning Tunneling Optical Microscopy (STOM) Using A Stylus Sensor Application To Topography Analysis Of Guiding Surfaces

Khaled Sarayeddine, Daniel Courjon, Michel Spajer

Author Affiliations +

Proceedings Volume 1139, Optical Storage and Scanning Technology; (1989) https://doi.org/10.1117/12.961775
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

For overpassing the classical limit of resolution in optical microscopy, it is necessary to detect the diffracted light from small objects in the near field and not in the far field as in classical microscopy. A particular case is the detection of the evanescent field lying on the surface of a guiding structure. These surface waves interact with the object details and then can be used for determining the topography of the object. The chief problem is the detection because the light beam is confined on the object surface. A solution consists of frustrating the evanescent field by means of a dielectric probe. The conversion of the in-homogeneous waves into homogeneous ones is fundamentally similar to the electronic tunneling effect. Subwavelength resolution can be obtained by placing a suitable optical stylus connected to an optical fibre near the surface. A xyz piezo-electric micropositioning system allows then to scan the object surface under test. A microscope exploiting this principle has been built. Preliminary experimental results are presented and discussed.

Citation Download Citation

Khaled Sarayeddine, Daniel Courjon, and Michel Spajer "Scanning Tunneling Optical Microscopy (STOM) Using A Stylus Sensor Application To Topography Analysis Of Guiding Surfaces", Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); https://doi.org/10.1117/12.961775

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