Paper
27 November 1989 Diffuse Scattering By Rough Surfaces At Soft-X-Ray Characteristic Wavelengths
R. Barchewitz, J. M. Andre
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Abstract
The influence of the surface-roughness induced scattering and the subsequent decrease of the specular reflectance is a major problem in designing X-UV optical systems such as grazing incidence mirrors used in imaging telescopes and synchrotron beam lines, or multi-layer structures recently developed as selective reflectors in the X-UV region. In this study, absolute reflectivity measurements are performed at soft-X-ray characte-ristic wavelengths and the effects of surface roughness are evidenced. The angular distri-bution of the reflected/scattered radiation (ADSR) is obtained by keeping the mirror fixed while scanning the detector. The ADSR presents a specular component and a diffuse scattering component (DSC). The DSC reveals characteristic features : side peaks and asymmetry, which can be analysed within the framework of the first-order vector theory of the roughness induced scattering.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Barchewitz and J. M. Andre "Diffuse Scattering By Rough Surfaces At Soft-X-Ray Characteristic Wavelengths", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961857
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KEYWORDS
Scattering

Reflectivity

X-rays

Mirrors

Grazing incidence

Laser scattering

Surface roughness

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