Phase-Modulating Zone Plates For X-Ray Microscopy

A. G. Michette; C. J. Buckley

doi:10.1117/12.961865

27 November 1989 Phase-Modulating Zone Plates For X-Ray Microscopy

A. G. Michette, C. J. Buckley

Proceedings Volume 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation; (1989) https://doi.org/10.1117/12.961865
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Zone plates made by carbon contamination lithography have been successfully used in the King's College/Daresbury scanning X-ray microscope. However, in their original carbon forms these zone plates suffer from low (~ 1%) diffraction efficiencies, while the outermost zone widths of the higher efficiency gold copies made by contact X-ray lithography are limited to about 50 nm, smaller zones becoming unresolvable due to diffraction effects. In this paper it will be shown that, by shadowing a rotating carbon master through an aperture, efficiencies of up to about 20% in the water-window region and approaching 10% at shorter wavelengths are possible, by selecting the shadowing material and by coating at the correct angles and to the correct thicknesses to utilise phase-modulating effects. Calculated tolerances on the rotation and displacement of the zone plate under the aperture indicate that outermost zone widths will be limited only by the capabilities of the contamination lithography process, which has already demonstrated the possibility of better than 20 nm, and not by the accuracies of available rotation and translation devices.

Citation Download Citation

A. G. Michette and C. J. Buckley "Phase-Modulating Zone Plates For X-Ray Microscopy", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961865

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available