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12 March 2020 Parylene-C diaphragm-based fiber-optic gas sensor based on photoacoustic spectroscopy
Zhenfeng Gong, Tianli Gao, Yewei Chen, Yexiang Jiao, Ke Chen, Qingxu Yu
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Proceedings Volume 11438, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology; 1143803 (2020) https://doi.org/10.1117/12.2540483
Event: 2019 International Conference on Optical Instruments and Technology, 2019, Beijing, China
Abstract
A low-frequency photoacoustic (PA) sensor based on Parylene-C diaphragm for micro-leakage gas detection is presented. The overall structure of the sensor head includes a cylindrical brass shell, a Parylene-C diaphragm, and a PA cavity regarded as a Fabry-Perot (F-P) cavity as well. The volume of the PA cavity is only 74 μL. A distributed feedback (DFB) laser is used as an acoustic excitation source. The PA pressure signal is obtained by measuring the deflection of the Parylene-C diaphragm using fiber-optic white-light interference (WLI) method. The PA sensor head is used for acetylene (C2H2) detection. A detection limit of 36 parts-per-billion (ppb) is achieved when the lock-in integration time is 1 s.
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Zhenfeng Gong, Tianli Gao, Yewei Chen, Yexiang Jiao, Ke Chen, and Qingxu Yu "Parylene-C diaphragm-based fiber-optic gas sensor based on photoacoustic spectroscopy", Proc. SPIE 11438, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology, 1143803 (12 March 2020); https://doi.org/10.1117/12.2540483
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KEYWORDS
Sensors
Fiber optics sensors
Photoacoustic spectroscopy
Fiber optics
Acoustics
Gas sensors
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