A study of subwavelength grating waveguide and coupling structures for 0.18 um CMOS process

Shuo Wang; Bin Wang; Tianfei Hou; Fusheng Zhao

doi:10.1117/12.2543488

12 March 2020 A study of subwavelength grating waveguide and coupling structures for 0.18 μm CMOS process

Shuo Wang, Bin Wang, Tianfei Hou, Fusheng Zhao

Proceedings Volume 11440, 2019 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices; 114400C (2020) https://doi.org/10.1117/12.2543488
Event: 2019 International Conference on Optical Instruments and Technology, 2019, Beijing, China

Abstract

Subwavelength grating (SWG) structures can greatly improve the design flexibility of silicon photonic integrated circuits. Most SWG structures reported in the literature so far are fabricated with electron beam lithography, limiting their use in mass production. In this work, a study has been carried out for the SWG waveguide and coupling structures that are compatible with 0.18 μm CMOS process. The optical propagation in this SWG waveguide has been analyzed, and the loss of coupling structures between solid silicon waveguide and SWG waveguide have been studied through simulation and measurement. The overall results show a potential of the design and fabrication of SWG waveguides with 0.18 μm CMOS process.

Citation Download Citation

Shuo Wang, Bin Wang, Tianfei Hou, and Fusheng Zhao "A study of subwavelength grating waveguide and coupling structures for 0.18 μm CMOS process", Proc. SPIE 11440, 2019 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices, 114400C (12 March 2020); https://doi.org/10.1117/12.2543488

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