FT-IR Study On Microstructure Of Diamondlike Amorphous Carbon Films

N. Nagai; M. Yoshikawa; H. Ishida; I. Nagai; A. Ishitani; H. Kuroda

doi:10.1117/12.969564

1 December 1989 FT-IR Study On Microstructure Of Diamondlike Amorphous Carbon Films

N. Nagai, M. Yoshikawa, H. Ishida, I. Nagai, A. Ishitani, H. Kuroda

Proceedings Volume 1145, 7th Intl Conf on Fourier Transform Spectroscopy; (1989) https://doi.org/10.1117/12.969564
Event: Seventh International Conference on Fourier and Computerized Infrared Spectroscopy, 1989, Fairfax, VA, United States

Abstract

IR spectra of diamondlike amorphous carbon (DLC) films prepared by plasma CVD method have been meaured. C-H stretching absorption bands due to hydrogen bonded to sp2 and sp3 carbons were observed. The relative hydrogen content in sp2 and sp3 bonding sites can be estimated from integrated intensity ratios. It has been also manifested that the relative hydrogen content is closely related with the carbon bonding states elucidated from the Raman spectra. The ATR method is also found to be useful to analyze the microstructure of thin DLC films of low hydrogen content.

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N. Nagai, M. Yoshikawa, H. Ishida, I. Nagai, A. Ishitani, and H. Kuroda "FT-IR Study On Microstructure Of Diamondlike Amorphous Carbon Films", Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); https://doi.org/10.1117/12.969564

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