Presentation
22 August 2020 A library-based approach to super resolution metrology and localization without imaging
Femius Koenderink, R. D. Buijs, T. Wolterink, Nick Schilder, E. Verhagen
Author Affiliations +
Abstract
Obtaining nanoscale spatial information without real-space imaging, but from diffraction patterns, is already a valuable tool in metrology We investigate the potential of metasurfaces for nano-optical sensing and metrology with subwavelength resolution. We aim to exploit complex light scattering from a metasurface, programmable illumination, and retrieval of spatial information of a sample from far-field scattering images. We demonstrate an inversion technique based on singular value decomposition whereby we can retrieve the spatial position of a pointlike light source in a plasmon antenna with lambda/50 resolution just on basis of measured far field radiation patterns. Also, we argue that wavefront-shaping applied to plasmon oligomers enables selective generation of sub-diffractive field patterns that could form an optimal and complete basis for spatially-resolved sensing at the nanoscale. Our endeavours use stochastic optimization to choose wavefronts and plasmonic structures.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Femius Koenderink, R. D. Buijs, T. Wolterink, Nick Schilder, and E. Verhagen "A library-based approach to super resolution metrology and localization without imaging", Proc. SPIE 11462, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XVIII, 1146208 (22 August 2020); https://doi.org/10.1117/12.2568088
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KEYWORDS
Antennas

Plasmons

Super resolution

Light scattering

Metrology

Spatial resolution

Wavefronts

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