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Birefringence behavior has been frequently obtained when subwavelength waveguides are used on devices construction. In order to explore this property, we analyze a tilted silicon-on-insulator periodically segmented waveguides (PSW). The propagation characteristics are analyzed for different values of duty cycle and tilt. The degree of the birefringence can be tailored only by changing SWGs structural parameters such as the grating period, the filling factor, and the tilting. Also the tilted PSW can works as a birefringent waveguide for both TE and TM modes polarization, an important and desired requisite in photonics circuit devices. The approach is easily adaptable to a wide range of waveguide dimension keeping the single-etch-step fabrication.
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Ana Juiia R. F. de Oliveira Barros, V. F. Rodriguez-Esquerre, "Analysis of tilted subwavelength periodical waveguides: polarization effects," Proc. SPIE 11467, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII, 114671Y (21 August 2020); https://doi.org/10.1117/12.2567812