Optical freeform generation of N-BK7 by fluorine‐based plasma jet machining

Faezeh Kazemi; Georg Boehm; Thomas Arnold

doi:10.1117/12.2564913

8 July 2020 Optical freeform generation of N-BK7 by fluorine‐based plasma jet machining

Faezeh Kazemi, Georg Boehm, Thomas Arnold

Proceedings Volume 11478, Seventh European Seminar on Precision Optics Manufacturing; 1147805 (2020) https://doi.org/10.1117/12.2564913
Event: Seventh European Seminar on Precision Optics Manufacturing, 2020, Teisnach, Germany

Abstract

The production of complex shaped optical elements like non-standard aspheres, acylinders, or freeform elements are highly demanded. Thus, optical manufacturing technologies need to be developed for optical systems to design freeform surfaces. Reactive Plasma Jet (RPJ) is one of the most promising tools for freeform generation of fused silica, SiC, ULE® and silicon. However, there are severe limitations when this technique is used for the surface machining of optical glasses like N-BK7®. The chemical interaction between plasma generated active species and metal components of N-BK7 induces the formation of a residual layer in the plasma-surface contact zone and surrounding which can degrade the capability of acquiring the required surface profile. It is shown that elevated surface temperature can modify the residual layer leading to higher predictability of freeform machining results.

Citation Download Citation

Faezeh Kazemi, Georg Boehm, and Thomas Arnold "Optical freeform generation of N-BK7 by fluorine‐based plasma jet machining", Proc. SPIE 11478, Seventh European Seminar on Precision Optics Manufacturing, 1147805 (8 July 2020); https://doi.org/10.1117/12.2564913

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