The thermal effect analysis on horizontal focus mirror surface deformation

Ming-Ying Hsu; Huang-Wen Fu; Hok-Sum Fung; Gung-Chian Yin; Yi-Jr Su; Yu-Shan Huang

doi:10.1117/12.2567201

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25 August 2020 The thermal effect analysis on horizontal focus mirror surface deformation

Ming-Ying Hsu, Huang-Wen Fu, Hok-Sum Fung, Gung-Chian Yin, Yi-Jr Su, Yu-Shan Huang

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Proceedings Volume 11484, Optical Modeling and Performance Predictions XI; 114840H (2020) https://doi.org/10.1117/12.2567201
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

This study is trying to design the thermal load effect on the soft x-ray beamline first mirror from ID (Insertion Device). The beamline first mirror is HFM (Horizontal Focus Mirror), the HFM need to absorb the thermal energy, soft X-ray the footprint size om HFM is 120*5.2 mm, the thermal power is about 270 W. The HFM cooling by the water pipe mounted on the thermal fin, mirror and thermal fin contact by Gallium–Indium alloy. The HFM thermal fin's Gallium–Indium alloy seal by nickel tube avoids leaking in the vacuum chamber. The HFM thermal fin design can cooling mirror backside and part of frontside, and the HFM thermal bump need small than 10u rad.

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Ming-Ying Hsu, Huang-Wen Fu, Hok-Sum Fung, Gung-Chian Yin, Yi-Jr Su, and Yu-Shan Huang "The thermal effect analysis on horizontal focus mirror surface deformation", Proc. SPIE 11484, Optical Modeling and Performance Predictions XI, 114840H (25 August 2020); https://doi.org/10.1117/12.2567201

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