Interference and scattering effects in the diffraction patterns of nanostructured layered samples

Anna Shlyagina; Alma K. Gonzalez-Alcalde; Rafael Salas-Montiel; Eugenio R. Mendez

doi:10.1117/12.2570623

20 August 2020 Interference and scattering effects in the diffraction patterns of nanostructured layered samples

Anna Shlyagina, Alma K. Gonzalez-Alcalde, Rafael Salas-Montiel, Eugenio R. Mendez

Proceedings Volume 11485, Reflection, Scattering, and Diffraction from Surfaces VII; 1148507 (2020) https://doi.org/10.1117/12.2570623
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

An experimental and theoretical study of the scattering and diffraction properties of nanopatterned dielectric structures is presented. The samples consist of periodic arrays of silicon disks over a flat layer of silicon dioxide on a silicon substrate. The samples produce far-field scattering patterns that display a series of well-defined circular fringes that modulate the intensity of the diffraction orders. Simple models of the physical mechanisms that give rise to the observed phenomena are proposed. Measurements of the angular scattering distribution produced by the samples are presented and compared them with the results of numerical calculations.

Conference Presentation

Citation Download Citation

Anna Shlyagina, Alma K. Gonzalez-Alcalde, Rafael Salas-Montiel, and Eugenio R. Mendez "Interference and scattering effects in the diffraction patterns of nanostructured layered samples", Proc. SPIE 11485, Reflection, Scattering, and Diffraction from Surfaces VII, 1148507 (20 August 2020); https://doi.org/10.1117/12.2570623

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