A carbon nanotube structure for an EUV window with differential pumping

Scott Olsen; Richard Vanfleet; David Allred; Steve Turley; Robert Davis

doi:10.1117/12.2569049

21 August 2020 A carbon nanotube structure for an EUV window with differential pumping

Scott Olsen, Richard Vanfleet, David Allred, Steve Turley, Robert Davis

Proceedings Volume 11491, Advances in X-Ray/EUV Optics and Components XV; 1149104 (2020) https://doi.org/10.1117/12.2569049
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

We report on a large-area, high-aspect-ratio, carbon nanotube (CNT) forest structure produced at BYU acting as a window/separator for a hollow cathode EUV lamp. The structure has large-surface-area, high light trans-mission, and differential pumping. CNT fabrication allows for variable dimensions, which allows various EUV distributions and pressure gradients to be possible. Theory is presented for predicting such distributions and gradients. Several structures have been fabricated; their dimensions, properties, and predicted distributions and gradients are given.

Conference Presentation

Citation Download Citation

Scott Olsen, Richard Vanfleet, David Allred, Steve Turley, and Robert Davis "A carbon nanotube structure for an EUV window with differential pumping", Proc. SPIE 11491, Advances in X-Ray/EUV Optics and Components XV, 1149104 (21 August 2020); https://doi.org/10.1117/12.2569049

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