Conditions in which off-plane diffraction can efficiently provide high spectral resolving power in EUV/soft x-ray monochromators

Werner H. Jark

doi:10.1117/12.2568660

21 August 2020 Conditions in which off-plane diffraction can efficiently provide high spectral resolving power in EUV/soft x-ray monochromators

Werner H. Jark

Author Affiliations +

Proceedings Volume 11491, Advances in X-Ray/EUV Optics and Components XV; 1149107 (2020) https://doi.org/10.1117/12.2568660
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

Especially at grazing angles of incidence off-plane diffraction from blazed gratings is more efficient than in-plane diffraction. It will here be discussed, whether a soft X-ray monochromator employing such gratings can achieve competetive high spectral resolving power.

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Werner H. Jark "Conditions in which off-plane diffraction can efficiently provide high spectral resolving power in EUV/soft x-ray monochromators", Proc. SPIE 11491, Advances in X-Ray/EUV Optics and Components XV, 1149107 (21 August 2020); https://doi.org/10.1117/12.2568660

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KEYWORDS

Diffraction

Spectral resolution

Diffraction gratings

X-rays

X-ray diffraction

Micromirrors

Mirrors

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