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21 August 2020 The pivot bearing rotation mechanism test for stitching interferometer measurement
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Abstract
The small radius x-ray mirror in the interferometer stitching measurement is needed high angle resolution rotation stage to get reliable angle information. The rotation stage rotary range requirement is not wide, because of the X-ray mirror radius generally large than 200M, and the mirror length small than 1.2M. The angle resolution is needed high resolution, therefore, in interferometer stitching measurement, the interferogram is easily affected by the rotation angle difference. Thus, this study is to design a small angle traveling range (rotation angle maximum ± 1.5 degrees), high angle resolution (10 nrad.), and high loading capacity (loading maximum 75 Kg) rotation stage, the rotation mechanism is applied pivot bearing to get high-resolution rotation angle. The rotation stage design is finished, this article discusses system assembly and test.
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Ming-Ying Hsu, Gung-Chian Yin, Bo-Yi Chen, Chien-yu Lee, Shang-Wei Lin, Hok-Sum Fung, and Yu-Shan Huang "The pivot bearing rotation mechanism test for stitching interferometer measurement", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920B (21 August 2020); https://doi.org/10.1117/12.2567561
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