In-situ metrology for adaptive x-ray optics with an in-position LTP system in the soft x-ray beamline

Shang-Wei Lin; Duan-Jen Wang; Chih-Yu Hua; Hok-Sum Fung; Ming-Ying Hsu; Gung-Chian Yin

doi:10.1117/12.2570538

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21 August 2020 In-situ metrology for adaptive x-ray optics with an in-position LTP system in the soft x-ray beamline

Shang-Wei Lin, Duan-Jen Wang, Chih-Yu Hua, Hok-Sum Fung, Ming-Ying Hsu, Gung-Chian Yin

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Proceedings Volume 11492, Advances in Metrology for X-Ray and EUV Optics IX; 114920G (2020) https://doi.org/10.1117/12.2570538
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

To achieve an ultrahigh-resolution for soft X-ray beamlines, the slope error of a highly precise grating is required on the level of 0.1 μrad root-mean-square (RMS) under thermal loading. To realize the goal, a specially designed 25-actuator optical surface bender for the gratings and mirrors is developed and operated at Taiwan Photon Source (TPS) [1]. In this paper, the construction and operation of the in situ LTP measuring system is described[2]. This LTP consists of a switchable optical reflection system that let the LTP can switch to measure horizontal or vertical mounting mirrors/gratings in the beamline. The other is a low optical distortion and bakeable to 120 ˚C glass viewport which is used for the ultra-high vacuum[3,4] interface for the beamlines optics and LTP. The surface slope error being reduced down to 0.1 and 0.15 μrad (RMS) by the 25-actuator bender without/with the glass viewport as verified by the in situ LTP measurements in the beamline.

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Shang-Wei Lin, Duan-Jen Wang, Chih-Yu Hua, Hok-Sum Fung, Ming-Ying Hsu, and Gung-Chian Yin "In-situ metrology for adaptive x-ray optics with an in-position LTP system in the soft x-ray beamline", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920G (21 August 2020); https://doi.org/10.1117/12.2570538

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