Paper
14 November 1977 Hard Overcoats
Harro W. D. Wahl
Author Affiliations +
Abstract
This paper deals with the various approaches taken to achieve hard overcoats or all dielectric optical thin film multilavers in replicated optics. It concludes that not much can be done to improve on conventional coating methods. The prerequisites for hard dielectric films still are a good vacuum and elevated substrate temperatures. To make these coatings readily available for reflective or refractive replicated components, a suitable release layer has to be found which will be compatible with temperatures of at least 300°C. at 1 x 10-6 torr. In addition, the release layer will have to be resilient enough in order to offer minimum adhesion to high surface tension dielectric stacks of any number of layers.
© (1977) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Harro W. D. Wahl "Hard Overcoats", Proc. SPIE 0115, Advances in Replicated and Plastic Optics, (14 November 1977); https://doi.org/10.1117/12.955631
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KEYWORDS
Dielectrics

Coating

Thin films

Multilayers

Aluminum

Optical components

Silicon

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