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Plasma ion assisted deposition (PIAD) was employed to prepare a dense capping layer (seal the top surface only) or shell layer (seal both the top surface and the sidewall) of an e-beam coating. The lateral water vapor diffusion was confirmed by a monolayer e-beam coating with a capping layer. The stress evolution and spectral shift of the multilayer e-beam coatings with/without capping/shell layers were comparatively studied. The protective effect of the shell layer on the e-beam coating was further investigated by water bath treatment. The experimental results proved that the PIAD shell layer can be used to address the time-dependent and environmental reliability issues of the e-beam coatings for high-power laser applications.
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Meiping Zhu, Tingting Zeng, Chaoyi Yin, Yuanan Zhao, Jianda Shao, "A strategy to improve the long-term stability of low-stress e-beam coatings," Proc. SPIE 11514, Laser-induced Damage in Optical Materials 2020, 1151414 (11 September 2020); https://doi.org/10.1117/12.2570984