Open-source software for SEM metrology

Iacopo Mochi; Michaela Vockenhuber; Timothée Allenet; Yasin Ekinci

doi:10.1117/12.2573154

13 October 2020 Open-source software for SEM metrology

Iacopo Mochi, Michaela Vockenhuber, Timothée Allenet, Yasin Ekinci

Author Affiliations +

Proceedings Volume 11518, Photomask Technology 2020; 115180G (2020) https://doi.org/10.1117/12.2573154
Event: SPIE Photomask Technology + EUV Lithography, 2020, Online Only

Abstract

We present SMILE, an open source software for the characterization of line and space patterns in SEM images. SMILE has been developed to provide a metrology platform which is open-source and, as such, easy to customize to specific needs and simple to integrate into a chain of analysis. SMILE is used to measure CD, LWR and unbiased LWR. The software is currently available as MATLAB code and under development for open platforms such as Python or Octave. Here we describe the main features of the software, its structure and the algorithms used to perform line edge detection, LWR calculation and LWR unbiasing.

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Citation Download Citation

Iacopo Mochi, Michaela Vockenhuber, Timothée Allenet, and Yasin Ekinci "Open-source software for SEM metrology", Proc. SPIE 11518, Photomask Technology 2020, 115180G (13 October 2020); https://doi.org/10.1117/12.2573154

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