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20 September 2020 Scalable nanotube-microbolometer technology with pixel pitches from 12 down to 6 µm
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Uncooled FIR-imagers decreased in pixel pitch from latest state-of-the-art value of 17 µm to 10 µm. Following this trend of a reduction of pixel size, Fraunhofer IMS provides a manufacturing process for FIR-imagers (IRFPAs) based on a scalable microbolometer technology. Beside conventional approaches of a thermal isolation of microbolometer membranes realized by lateral legs, Fraunhofer IMS developed a manufacturing process for a thermal isolation realized by nanotubes. To demonstrate the scalability of the nanotube-microbolometers the nanotube contact is applied to microbolometer membranes with 12, 10, 8 and 6 µm pixel size on top of a 17 µm digital readout integrated circuit (ROIC). The arrays are sealed by a chip-scale vacuum package to evaluate the microbolometers’ performance by means of a complete IRFPA. Quantitative measurement results for the responsivity as well as qualitative test pictures of the 12, 10 and 8 µm nanotube-microbolometers will be presented. A direct visual comparison in a test scene demonstrates no obvious decrease in sensitivity between 12 and 8 µm. Only at 6 µm pixel size a reduced sensitivity is observed. In summary, a fully working uncooled IRFPA with QQVGA resolution based on a 6 µm nanotube-microbolometer technology is presented here. The scalability of the nanotube-microbolometer technology from state-of-the-art pixel sizes down to 6 µm is demonstrated.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Michel, S. Weyers, D. Weiler, S. Blaeser, E. Zakizade, F. Hochschulz, and H. Vogt "Scalable nanotube-microbolometer technology with pixel pitches from 12 down to 6 µm", Proc. SPIE 11537, Electro-Optical and Infrared Systems: Technology and Applications XVII, 1153704 (20 September 2020);

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