Application of femtosecond laser in quartz tuning device microprocessing

Ting She; You Wang; Xun Mao; Defeng Liu; Yutang Dai

doi:10.1117/12.2574010

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10 October 2020 Application of femtosecond laser in quartz tuning device microprocessing

Ting She, You Wang, Xun Mao, Defeng Liu, Yutang Dai

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Proceedings Volume 11546, Advanced Laser Processing and Manufacturing IV; 115460I (2020) https://doi.org/10.1117/12.2574010
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

Quartz tuning fork is a kind of widely used piezoelectric device. However, as a hard and brittle material, silicon dioxide crystal, which is the core component of tuning fork, is difficult to realize high precision microprocessing. In this paper, femtosecond laser is used to process silicon dioxide crystal. The laser processing parameters which affect quality of tuning fork sidewall are theoretically analyzed, and an experimental study is carried out to optimize the technological parameters and improve the quality of tuning fork crystal. In addition, a set of processing route of quartz tuning device is designed, The tuning fork sensor manufactured has the characteristics of low cost, compact structure, low power consumption and will have a wide application prospects in the future.

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Ting She, You Wang, Xun Mao, Defeng Liu, and Yutang Dai "Application of femtosecond laser in quartz tuning device microprocessing", Proc. SPIE 11546, Advanced Laser Processing and Manufacturing IV, 115460I (10 October 2020); https://doi.org/10.1117/12.2574010

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