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10 October 2020 Borosilicate glass drilling by longitudinally excited CO2 laser
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Abstract
We developed a longitudinally excited CO2 laser with controllable a laser pulse waveform, and a simple, compact and low cost device. We investigated 146-μm-thickness borosilicate glass drilling depended on a fluence to consider applications of a longitudinally excited CO2 laser. The laser processing system was consisted of the CO2 laser with the repetition rate of 1 Hz, CaF2 attenuators, a beam expander, a ZnSe focusing lens with the focal length of 12.7 mm and the glass sample. The focus spot was on the sample surface. An assist gas for cooling the sample and removing debris was not used. The CO2 laser produced a short laser pulse had a spike pulse with the pulse width of 300 ns, a pulse tail with the length of 100 µs and the energy ratio of the energy of the spike pulse part to the energy of the pulse tail part of 1:25. The short laser pulse produced a crack-free piercing hole without assist gas. On the other hand, a heat affected zone (HAZ) was produced around a piercing hole. In this work, the smallest piercing hole diameter in each condition was about 50% of the irradiation diameter of 125 μm.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshihito Baba and Kazuyuki Uno "Borosilicate glass drilling by longitudinally excited CO2 laser", Proc. SPIE 11546, Advanced Laser Processing and Manufacturing IV, 115460O (10 October 2020); https://doi.org/10.1117/12.2573908
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