Study on dwell time compensation method of atmospheric pressure plasma processing

Zhe Wang; Lingqi Wu; Chen Hu; Lunzhe Wu; Bing Peng; Aihuan Dun; Xueke Xu; Xiaolei Zhu

doi:10.1117/12.2573825

10 October 2020 Study on dwell time compensation method of atmospheric pressure plasma processing

Zhe Wang, Lingqi Wu, Chen Hu, Lunzhe Wu, Bing Peng, Aihuan Dun, Xueke Xu, Xiaolei Zhu

Proceedings Volume 11548, Optical Design and Testing X; 115481L (2020) https://doi.org/10.1117/12.2573825
Event: SPIE/COS Photonics Asia, 2020, Online Only

Conference Poster

Abstract

Continuous phase plate (CPP) is an important diffractive optical element, which is widely used in high power laser devices. The continuous phase plate with a small aperture period of 4 mm is processed by the atmospheric pressure plasma polishing (APPP). Through the study of the reaction mechanism, it is found that the removal volume has a non-linear relationship with the dwell time, which will lead to machining errors. Based on this, a dwell time compensation method is proposed, and the machining program is generated according to this relationship. A 70mm × 70mm × 20mm continuous phase plate was fabricated by using the processing program generated by this method. The processing time was 4.5h, and the surface residual converged to 57.188nm RMS. The experimental results show that the method can effectively calculate the removal function under different dwell time, and significantly improve the machining accuracy.

Citation Download Citation

Zhe Wang, Lingqi Wu, Chen Hu, Lunzhe Wu, Bing Peng, Aihuan Dun, Xueke Xu, and Xiaolei Zhu "Study on dwell time compensation method of atmospheric pressure plasma processing", Proc. SPIE 11548, Optical Design and Testing X, 115481L (10 October 2020); https://doi.org/10.1117/12.2573825

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